The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world.
The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including:
- Thin-film integrated passives as an alternative to discrete passives
- The possibility of piezoelectric MEMS
- Solutions for MEMS gyroscopes
- Advanced interconnect technologies
- Ambient energy harvesting
- Bulk acoustic wave resonators
- Ultrasonic receiver arrays using MEMS sensors
- Optical MEMS-based spectrometers
- The integration of MEMS resonators with conventional circuitry
- A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns
- Wireless microactuators to enable implantable MEMS devices for drug delivery
- MEMS technologies for tactile sensing and actuation in robotics
- MEMS-based micro hot-plate devices
- Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring
- Sensors using passive acousto-electric devices in wired and wireless systems
Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.
Key Features - Reviews groundbreaking technology and applications in the field of MEMS.
- Covers applications such as oscillators, gyroscopes in cameras for optical image stabilization, radio communication, and drug delivery.
- Presents the historical evolution of current nano micro systems.
- Includes several chapters on MEMS resonators, covering fundamentals and engineering to enable novel applications.
- Highlights challenges and questions for further research.
- Contains more than 360 illustrations.
Contents
Part 1 Breakthrough Technology
- Chapter 1 Microsystems to Nano-Microsystems: A Technological Breakthrough
- Chapter 2 HfO2-Based High-κ Dielectrics for Use in MEMS Applications
- Chapter 3 Piezoelectric Thin Films for MEMS Applications
- Chapter 4 CMOS Systems and Interfaces for sub-deg/hr Microgyroscopes
- Chapter 5 Bulk Acoustic Wave Gyroscopes
- Chapter 6 Mechanically Flexible Interconnects and TSVs: Applications in CMOS/MEMS Integration
- Chapter 7 Modeling of Piezoelectric MEMS Vibration Energy Harvesters
- Chapter 8 Interface Circuits for Capacitive MEMS Gyroscopes
- Chapter 9 Electromechanical Loops for High-Performance and Robust Gyroscope System Design
Part 2 MEMS-Based Novel Applications
- Chapter 10 Bulk Acoustic Wave Resonators for Mobile Communication Systems
- Chapter 11 Wideband Ultrasonic Transmitter and Sensor Array for In-Air Applications
- Chapter 12 MEMS-Based Lamellar Grating Fourier Transform Spectrometers
- Chapter 13 Microelectromechanical Resonators for RF Applications
- Chapter 14 Rigid Body Motion Capturing by Means of Wearable Inertial and Magnetic MEMS Sensor Assembly—From Reconstitution of the Posture toward Dead Reckoning: An Application in Bio-Logging
- Chapter 15 Radio-Controlled Wireless MEMS Actuators and Applications
- Chapter 16 Advanced MEMS Technologies for Tactile Sensing and Actuation
- Chapter 17 MEMS-Based Micro Hot-Plate Devices
- Chapter 18 A Wireless Sensor Networks Enabled Inertial Sensor
- Chapter 19 Passive Radio-Frequency Acoustic Sensors and Systems for Wired and Wireless Applications
- Index
About the Authors
- Vikas Choudhary is currently a senior manager of MEMS and Sensor Technology Group at Analog Devices, where he is involved in design and management of products for Inertial MEMS. He also manages a team of engineers involved in the design of high-performance precision analog-to-digital converters. Vikas has more than 18 years of experience in the semiconductor industry, including as the architect and lead designer for several RFIC subsystems such as 802.16e and 802.11n. He has held various management and design positions at PMC-Sierra, Inc., Texas Instruments, and STMicroelectronics. He has three issued patents. His current research interests are in the field of applied signal processing for high-performance analog circuits and systems.
- Krzysztof (Kris) Iniewski manages R&D at Redlen Technologies, Inc., a startup company in Vancouver, Canada. He is also the president of CMOS Emerging Technologies Research Inc., an organization of high-tech events covering communications, microsystems, optoelectronics, and sensors. Dr. Iniewski has held numerous faculty and management positions at the University of Toronto, University of Alberta, Simon Fraser University, and PMC-Sierra, Inc. He has published more than 100 research papers in international journals and conferences. He holds 18 international patents granted in the United States, Canada, France, Germany, and Japan. He is a frequent invited speaker, has consulted for multiple organizations internationally, and has written and edited several books.
Book Details
- Hardcover: 478 pages
- Publisher: CRC Press; 1 edition (June, 2013)
- Language: English
- ISBN-10: 1466515813
- ISBN-13: 978-1466515819
- List price: $149.95